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Instrument Description

Type:
E-beam Evaporation
Make:
Lesker
Model:
Lab 18

Usage Info

Availability:
Internal and external researchers
Training Requirements:
Training is performed by Harley Hart of the WVU SRF and is scheduled via iLab.
SRA-approved rates:
Yes

Location

Campus:
Evansdale
College:
Benjamin M. Statler College of Engineering and Mineral Resources
Department:
WVU SRF
Address:
Engineering Sciences Building G75B (Cleanroom)

Kurt J Lesker Lab 18 E-beam Evaporator

The Kurt J Lesker Lab 18 E-beam Evaporator is used for the the evaporation of metal thin films.

Capabilities/Specifications

  • Computer controlled HV system with loadlock for high throughput
  • Six pocket, single e-beam source
  • Available source materials: aluminum, chromium, cobalt, copper, gold, nickel, platinum and titanium - User source materials which is specific to a project can be installed upon request
  • 3 in-situ crystal deposition monitors
  • Maximum sample size of 4 inch in diameter
  • Rotatable substrate holder to improve uniformity
  • Backside substrate heater with a maximum temperature of 850°C
  • Base pressure of instrument is 10-8 Torr
  • Data logging of process is available

Contact

Harley Hart

Trieu Nguyen

(916) 532-4710

Trieu.nguyen@mail.wvu.edu

ESB G60 | WH 409