Instrument Description
Type:
E-beam Evaporation
Make:
Lesker
Model:
Lab 18
Manufacturer URL:
Kurt J Lesker Lab 18 E-beam Evaporator
Kurt J Lesker Lab 18 E-beam Evaporator
Usage Info
Availability:
Internal and external researchers
Internal and external researchers
Training Requirements:
Training is performed by Harley Hart of the WVU SRF and is scheduled via iLab.
Training is performed by Harley Hart of the WVU SRF and is scheduled via iLab.
SRA-approved rates:
Yes
Yes
Location
Campus:
Evansdale
College:
Benjamin M. Statler College of Engineering and Mineral Resources
Department:
WVU SRF
Address:
Engineering Sciences Building G75B (Cleanroom)
Kurt J Lesker Lab 18 E-beam Evaporator
The Kurt J Lesker Lab 18 E-beam Evaporator is used for the the evaporation of metal thin films.
Capabilities/Specifications
- Computer controlled HV system with loadlock for high throughput
- Six pocket, single e-beam source
- Available source materials: aluminum, chromium, cobalt, copper, gold, nickel, platinum and titanium - User source materials which is specific to a project can be installed upon request
- 3 in-situ crystal deposition monitors
- Maximum sample size of 4 inch in diameter
- Rotatable substrate holder to improve uniformity
- Backside substrate heater with a maximum temperature of 850°C
- Base pressure of instrument is 10-8 Torr
- Data logging of process is available