Instrument Description
Type:
Thermal Processing
Make:
Lindberg
Model:
Blue M
Manufacturer URL:
Lindberg Blue M Tube Furnace
Lindberg Blue M Tube Furnace
Usage Info
Availability:
Internal and external researchers
Internal and external researchers
Training Requirements:
Request training via iLab.
*Safety related prerequisite trainings may be required.
Request training via iLab.
*Safety related prerequisite trainings may be required.
SRA-approved rates:
Yes
Yes
Location
Campus:
Evansdale
College:
Benjamin M. Statler College of Engineering and Mineral Resources
Department:
WVU SRF
Address:
Engineering Sciences Building G75B (Cleanroom)
Lindberg Blue M Tube Furnace
The Lindberg Blue M Tube Furnace is used for silicon oxide and titanium oxide growth.
Capabilities/Specifications
- For up to 3-inch diameter wafers
- Maximum temperature of 1200°C