Instrument Description
Type:
Etching
Make:
March
Model:
PX-250
Usage Info
Availability:
Internal and external researchers
Internal and external researchers
Training Requirements:
Request training via iLab.
*Safety related prerequisite trainings may be required.
Request training via iLab.
*Safety related prerequisite trainings may be required.
SRA-approved rates:
Yes
Yes
Location
Campus:
Evansdale
College:
Benjamin M. Statler College of Engineering and Mineral Resources
Department:
WVU SRF
Address:
Engineering Sciences Building G75B (Cleanroom)
March PX-250 Plasma Asher
The March PX-250 Plasma Asher is used for cleaning substrates with oxygen plasma and photoresist removal.
Capabilities/Specifications
- 8 in. x 8 in. shelf can accommodate a variety of substrate sizes
- 300W maximum RF power