Instrument Description
Type:
Material Characterization
Make:
Tencor
Model:
Alpha Step
Manufacturer URL:
Tencor Stylus Profilometer
Tencor Stylus Profilometer
Usage Info
Availability:
Internal and external researchers
Internal and external researchers
Training Requirements:
Request training via iLab.
*Safety related prerequisite trainings may be required.
Request training via iLab.
*Safety related prerequisite trainings may be required.
SRA-approved rates:
Yes
Yes
Location
Campus:
Downtown
College:
Eberly College of Arts and Sciences
Department:
WVU SRF
Address:
White Hall 410 (Cleanroom)
Tencor Stylus Profilometer
The Tencor Alpha Step Stylus Profilometer is used for measuring thickness of thin films and photoresist coatings.
Capabilities/Specifications
•10 µm horizontal scan range
•Measures hard or soft films (i.e. polymers)