Instrument Description
Type:
Mass Spectrometry
Make:
DISCO
Model:
DAD-3240
Manufacturer URL:
DISCO DAD 3240 Wafer Dicer
DISCO DAD 3240 Wafer Dicer
Usage Info
Availability:
Internal and external researchers
Internal and external researchers
Training Requirements:
Request training via iLab.
*Safety related prerequisite trainings may be required.
Request training via iLab.
*Safety related prerequisite trainings may be required.
SRA-approved rates:
Yes
Yes
Location
Campus:
Downtown
College:
Eberly College of Arts and Sciences
Department:
WVU SRF
Address:
White Hall 414 (Cleanroom)
DISCO DAD 3240 Wafer Dicer
The DISCO DAD 3240 Wafer Dicer is a high throughput instrument for the dicing of materials from silicon to ceramics.
Capabilities/Specifications
- Computer controlled wafer dicer
- Auto alignment function for back-end dicing of samples
- Minimum indexing step in X and Y direction of 0.0001mm
- Maximum sample size of 6 inch
- Blades are research project and are supplied by the researcher. For assistance with choosing a dicing blade, contact an SRF staff member.
- Can be configured for use of hub or hub-less style blades
- Instrument chucks available for use are ceramic or vacuum
- Process Tape Thickness is 0.076 mm
- Hubless Flange Size is 49.4 x 40 mm